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The Electrodeless Plating Mechanism of Copper onto Silicon Surfaces in Dilute Hydrofluoric Acid Solutions

著者名:
掲載資料名:
Proceedings of the International Symposium on New Directions in Electroanalytical Chemistry
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-9
発行年:
1996
開始ページ:
234
終了ページ:
247
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771610 [1566771617]
言語:
英語
請求記号:
E23400/962351
資料種別:
国際会議録

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