High Microwave Power ECR Etching of III-V Semiconductors in CH4/H2/Ar
- 著者名:
Lee, J.W. Pearton, S.J. Lambers, E.S. Mileham, J.R. Abernathy, C.R. Hobson, W.S. Ren, F. Shul, R.J. - 掲載資料名:
- Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 96-2
- 発行年:
- 1996
- 開始ページ:
- 203
- 終了ページ:
- 213
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771528 [1566771528]
- 言語:
- 英語
- 請求記号:
- E23400/962066
- 資料種別:
- 国際会議録
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