Novel method to reduce the surface recombination velocity for the carrier lifetime measurement in silicon wafers
- 著者名:
- 掲載資料名:
- ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 95-30
- 発行年:
- 1995
- 開始ページ:
- 44
- 終了ページ:
- 53
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771221 [1566771226]
- 言語:
- 英語
- 請求記号:
- E23400/961027
- 資料種別:
- 国際会議録
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