An Optimized LIGA/MEMS Process for Polymer Waveguides on a Linear Microactuator
- 著者名:
Ghodssi, R. White, V. Heidey, C. Archie, C. Denton, D.D. McCaughan, L. - 掲載資料名:
- Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 95-27
- 発行年:
- 1995
- 開始ページ:
- 141
- 終了ページ:
- 150
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771238 [1566771234]
- 言語:
- 英語
- 請求記号:
- E23400/961024
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
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MRS - Materials Research Society |
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6
国際会議録
Effect of As-processed and annealed microstructures on the mechanical properties of LIGA Ni MEMS
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SPIE - The International Society for Optical Engineering |