ANALYSIS OF SUBMICRON ALUMINUM AND ALUMINA PARTICLES BY TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY (TOF-SIMS)

ANALYSIS OF SUBMICRON ALUMINUM AND ALUMINA PARTICLES BY TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY (TOF-SIMS)

著者名:

掲載資料名:

Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

95-20

発行年:

1995

開始ページ:

518

終了ページ:

525

総ページ数:

8

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771153 [1566771153]

言語:

英語

請求記号:

E23400/962140

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013825
シリーズID:	PA00000028
会議名:	International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ; Fall Electrochemical Society Meeting
回次:	4th
会議開催地:	Chicago, Illinois, USA
会議開催年:	1995.10.00

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