On the Nature of Future MEMS - A Perspective
- 著者名:
- Zappe, H.H.
- 掲載資料名:
- Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 95-18
- 発行年:
- 1995
- 開始ページ:
- 223
- 終了ページ:
- 235
- 総ページ数:
- 13
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771139 [1566771137]
- 言語:
- 英語
- 請求記号:
- E23400/961821
- 資料種別:
- 国際会議録
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