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On the Nature of Future MEMS - A Perspective

著者名:
Zappe, H.H.  
掲載資料名:
Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-18
発行年:
1995
開始ページ:
223
終了ページ:
235
総ページ数:
13
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771139 [1566771137]
言語:
英語
請求記号:
E23400/961821
資料種別:
国際会議録

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