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Surface Evolution in a Pulsed Laser Induced Epitaxy Process of Submicron SiGe Wires

著者名:
掲載資料名:
Proceedings of the Symposium on Nondestructive Wafer Characterization for Compound Semiconductor Materials and the twenty-second State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXII)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-6
発行年:
1995
開始ページ:
326
終了ページ:
331
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771009 [1566771005]
言語:
英語
請求記号:
E23400/952066
資料種別:
国際会議録

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