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LARGE AREA DIAMOND FILM DEPOSITION FOR MULTICHIP MODULES (MCMS)

著者名:
Brown, W.D.
Beera, R.
Haque, M.S.
Naseem, H.A.
Bootz, D.
Gordon, M.H.
Malshe, A.P.
さらに 2 件
掲載資料名:
Proceedings of the Fourth International Symposium on Diamond Materials
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-4
発行年:
1995
開始ページ:
636
終了ページ:
642
総ページ数:
7
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770989 [156677098X]
言語:
英語
請求記号:
E23400/952064
資料種別:
国際会議録

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