Grain Oriented Thin Film Microstructure Simulator
- 著者名:
- 掲載資料名:
- Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 95-2
- 発行年:
- 1995
- 開始ページ:
- 541
- 終了ページ:
- 552
- 総ページ数:
- 12
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770965 [1566770963]
- 言語:
- 英語
- 請求記号:
- E23400/952062
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
MRS-Materials Research Society |
9
国際会議録
Theory and Computer Simulation of Microstructure Evolution in Polycrystalline Metallic Thin Films
Electrochemical Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
MRS - Materials Research Society |
Society of Vacuum Coaters |