Determination of the Relative F Concentration and its Radial Profile by Plasma Parameter Normalization in an Electron Cyclotron Resonance SF6/Ar Discharge
- 著者名:
- 掲載資料名:
- Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 95-2
- 発行年:
- 1995
- 開始ページ:
- 339
- 終了ページ:
- 349
- 総ページ数:
- 11
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770965 [1566770963]
- 言語:
- 英語
- 請求記号:
- E23400/952062
- 資料種別:
- 国際会議録
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