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Deep dry etching process development for photonic crystals in InP-based planar waveguides

著者名:
van der Heijden, R.W. ( Technische Univ. Eindhoven (Netherlands) )
Andriesse, M.S.P. ( Technische Univ. Delft (Netherlands) )
Carlstrom, C.-F. ( Technische Univ. Eindhoven (Netherlands) )
van der Drift, E. ( Technische Univ. Delft (Netherlands) )
Geluk, E.-J. ( Technische Univ. Eindhoven (Netherlands) )
Karouta, A.F. ( Technische Univ. Eindhoven (Netherlands) )
Nouwens, P.A. ( Technische Univ. Eindhoven (Netherlands) )
Oei, Y.S. ( Technische Univ. Eindhoven (Netherlands) )
de Vries, T. ( Technische Univ. Eindhoven (Netherlands) )
Salemink, H.W.M. ( Technische Univ. Eindhoven (Netherlands) )
さらに 5 件
掲載資料名:
Photonic Crystal Materials and Nanostructures
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5450
発行年:
2004
開始ページ:
523
終了ページ:
532
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453730 [0819453730]
言語:
英語
請求記号:
P63600/5450
資料種別:
国際会議録

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