CPL reticle technology for advanced device applications
- 著者名:
Conley, W.E. ( Motorola, Inc. (USA) ) Van Den Broeke, D.J. ( ASML (USA) ) Socha, R.J. ( ASML (USA) ) Wu, W. ( Motorola, Inc. (USA) ) Litt, L.C. ( Motorola, Inc. (USA) ) Lucas, K.D. ( Motorola, Inc. (USA) ) Roman, B.J. ( Motorola, Inc. (USA) ) Peters, R.D. ( Motorola, Inc. (USA) ) Parker, C. ( Motorola, Inc. (USA) ) Chen, J.F. ( ASML (USA) ) Wampler, K.E. ( ASML (USA) ) Laidig, T.L. ( ASML (USA) ) Schaefer, E. ( ASML (Netherlands) ) Kuijten, J.-P. ( ASML (Netherlands) ) Verhappen, A. ( ASML (Netherlands) ) van de Goor, S. ( ASML (Netherlands) ) Chaplin, M. ( ASML (USA) ) Kasprowicz, B.S. ( Photronics, Inc. (USA) ) Progler, C.J. ( Photronics, Inc. (USA) ) Robert, E. ( STMicroelectronics (France) ) Thony, P. ( STMicroelectronics (France) ) Hathorn, M.E. ( Rochester Institute of Technology (USA) ) - 掲載資料名:
- Photomask and Next-Generation Lithography Mask Technology XI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5446
- 発行年:
- 2004
- 開始ページ:
- 578
- 終了ページ:
- 584
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453693 [0819453692]
- 言語:
- 英語
- 請求記号:
- P63600/5446.2
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
国際会議録
Process, design, and optical proximity correction requirements for the 65-nm device generation
SPIE-The International Society for Optical Engineering |