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Packaging and characterization of micro-opto-electro-mechanical systems

著者名:
  • Saupe, R. ( Technische Univ. Chemnitz (Germany) )
  • Otto, T. ( Fraunhofer-Institut fuer Zuverlassigkeit und Mikrointegration (Germany) )
  • Stock, V. ( COLOUR CONTROL Farbmesstechnik GmbH (Germany) )
  • Fritzsch, U. ( COLOUR CONTROL Farbmesstechnik GmbH (Germany) )
  • Gessner, T. ( Technische Univ. Chemnitz (Germany) and Fraunhofer-Institut fur Zuverlaessigkeit und Mikrointegration (Germany) )
掲載資料名:
Microwave and Optical Technology 2003
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5445
発行年:
2004
開始ページ:
152
終了ページ:
155
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453686 [0819453684]
言語:
英語
請求記号:
P63600/5445
資料種別:
国際会議録

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