Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma
- 著者名:
- Efremov, A. ( Ivanovo State Univ. of Chemistry and Technology (Russia) and Chung-Ang Univ. (South Korea) )
- Svettsov, V. ( Ivanovo State Univ. of Chemistry and Technology (Russia) )
- Kim, C.-I. ( Chung-Ang Univ. (South Korea) )
- 掲載資料名:
- Micro- and Nanoelectronics 2003
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5401
- 発行年:
- 2004
- 開始ページ:
- 64
- 終了ページ:
- 71
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453242 [0819453242]
- 言語:
- 英語
- 請求記号:
- P63600/5401
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
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SPIE - The International Society of Optical Engineering |
Electrochemical Society |
MRS - Materials Research Society |
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SPIE - The International Society of Optical Engineering |
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11
国際会議録
Etching Mechanism Of PZT Thin Films In Inductively Coupled Cl2/Ar Plasma With Additive CF4 Gas
Electrochemical Society |
SPIE - The International Society for Optical Engineering |