Pulse laser processing of metal thin films on glass substrates

Pulse laser processing of metal thin films on glass substrates

著者名:

Mikheev, G.M. ( Institute of Applied Mechanics (Russia) )
Zonov, R.G. ( Institute of Applied Mechanics (Russia) )
Kaluzhny, D.G. ( Institute of Applied Mechanics (Russia) )

掲載資料名:

Laser-Assisted Micro- and Nanotechnologies 2003

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5399

発行年:

2004

開始ページ:

179

終了ページ:

183

総ページ数:

5

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453228 [0819453226]

言語:

英語

請求記号:

P63600/5399

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013751
シリーズID:	PA00000029
会議名:	Laser-Assisted Micro- and Nanotechnologies
回次:	2003
会議開催地:	St. Petersburg, Russia
会議開催年:	2003.06.29-2003.07.03

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