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Design and test of a microfabricated SU-8 optical scanner

著者名:
掲載資料名:
Health monitoring and smart nondestructive evaluation of structural and biological systems III : 15-17 March 2004, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5394
発行年:
2004
開始ページ:
280
終了ページ:
287
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453112 [0819453110]
言語:
英語
請求記号:
P63600/5394
資料種別:
国際会議録

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