CAD/CAM for MEMS and BioMEMS
- 著者名:
Hargrave, B. ( nScrypt, LLC (USA) ) Irwin, B. ( nScrypt, LLC (USA) ) Parkhill, R. ( nScrypt, LLC (USA) ) Church, K.H. ( nScrypt, LLC (USA) ) Nguyen, M.N. ( BioAssembly, LLC (USA) ) Kachurin, A. ( BioAssembly, LLC (USA) ) Warren, W.L. ( BioAssembly, LLC (USA) ) - 掲載資料名:
- Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5389
- 発行年:
- 2004
- 開始ページ:
- 114
- 終了ページ:
- 125
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453068 [0819453064]
- 言語:
- 英語
- 請求記号:
- P63600/5389
- 資料種別:
- 国際会議録
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