Experimental verification of a model-based decomposition method for double dipole lithography
- 著者名:
Eurlings, M. ( ASML (Netherlands) ) Hsu, S.D. ( ASML (USA) ) Hendrickx, E. ( IMEC (Belgium) ) op 't Root, W. ( Technische Univ. Eindhoven (Netherlands) ) Laidig, T.L. ( ASML (USA) ) Chiou, T.-B. ( ASML (Taiwan) ) Chen, A. ( ASML (Taiwan) ) Chen, F. ( ASML (USA) ) Vandenberghe, G. ( IMEC (Belgium) ) Finders, J. ( ASML (Netherlands) ) - 掲載資料名:
- Optical Microlithography XVII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5377
- 発行年:
- 2004
- 開始ページ:
- 1225
- 終了ページ:
- 1236
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452900 [0819452904]
- 言語:
- 英語
- 請求記号:
- P63600/5377.2
- 資料種別:
- 国際会議録
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