Evaluation of the critical dimension control requirements in the ITRS using statistical simulation and error budgets
- 著者名:
- Hector, S.D. ( Motorola, Inc. (USA) and International SEMATECH (USA) )
- Postnikov, S.V. ( Motorola, Inc. (USA) )
- Cobb, J. ( Motorola, Inc. (USA) )
- 掲載資料名:
- Optical Microlithography XVII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5377
- 発行年:
- 2004
- 開始ページ:
- 555
- 終了ページ:
- 570
- 総ページ数:
- 16
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452900 [0819452904]
- 言語:
- 英語
- 請求記号:
- P63600/5377.1
- 資料種別:
- 国際会議録
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SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |