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Silicon backbone polymers as EUV resists

著者名:
Bravo-Vasquez, J.P. ( Cornell Univ. (USA) )
Kwark, Y.-J. ( Cornell Univ. (USA) )
Ober, C.K. ( Cornell Univ. (USA) )
Cao, H.B. ( Intel Corp. (USA) )
Deng, H. ( Intel Corp. (USA) )
Meagley, R.P. ( Intel Corp. (USA) )
さらに 1 件
掲載資料名:
Advances in Resist Technology and Processing XXI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5376
発行年:
2004
開始ページ:
739
終了ページ:
745
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452894 [0819452890]
言語:
英語
請求記号:
P63600/5376.2
資料種別:
国際会議録

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