Measurements of water distribution in thin lithographic films
- 著者名:
Vogt, B.D. ( National Institute of Standards and Technology (USA) ) Soles, C.L. ( National Institute of Standards and Technology (USA) ) Prabhu, V.M. ( National Institute of Standards and Technology (USA) ) Jones, R.L. ( National Institute of Standards and Technology (USA) ) Wu, W.-L. ( National Institute of Standards and Technology (USA) ) Lin, E.K. ( National Institute of Standards and Technology (USA) ) Goldfarb, D.L. ( IBM Thomas J. Watson Research Ctr. (USA) ) Angelopoulos, M. ( IBM Thomas J. Watson Research Ctr. (USA) ) - 掲載資料名:
- Advances in Resist Technology and Processing XXI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5376
- 発行年:
- 2004
- 開始ページ:
- 56
- 終了ページ:
- 62
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452894 [0819452890]
- 言語:
- 英語
- 請求記号:
- P63600/5376.1
- 資料種別:
- 国際会議録
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