Across-wafer CD uniformity enhancement through control of multizone PEB profiles
- 著者名:
Zhang, Q. ( Univ. of California/Berkeley (USA) ) Friedberg, P.D. ( Univ. of California/Berkeley (USA) ) Tang, C. ( Advanced Micro Devices, Inc. (USA) ) Singh, B. ( Advanced Micro Devices, Inc. (USA) ) Poolla, K. ( Univ. of California/Berkeley (USA) ) Spanos, C.J. ( Univ. of California/Berkeley (USA) ) - 掲載資料名:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5375
- 発行年:
- 2004
- 開始ページ:
- 276
- 終了ページ:
- 286
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- 言語:
- 英語
- 請求記号:
- P63600/5375.1
- 資料種別:
- 国際会議録
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