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Silanized polymeric working stamps for hot embossing lithography

著者名:
Wissen, M. ( Univ. of Wuppertal (Germany) )
Bogdanski, N. ( Univ. of Wuppertal (Germany) )
Jerzy, R. ( Univ. of Wuppertal (Germany) )
Berrada, Z.E. ( Univ. of Wuppertal (Germany) )
Fink, M. ( micro resist technology GmbH (Germany) )
Reuther, F. ( micro resist technology GmbH (Germany) )
Glinsner, T. ( EV Group (Austria) )
Scheer, H.-C. ( Univ. of Wuppertal (Germany) )
さらに 3 件
掲載資料名:
Emerging Lithographic Technologies VIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5374
発行年:
2004
開始ページ:
998
終了ページ:
1005
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452870 [0819452874]
言語:
英語
請求記号:
P63600/5374.2
資料種別:
国際会議録

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