Sub-80-nm contact hole patterning using Step and Flash Imprint Lithography
- 著者名:
Mancini, D.P. ( Motorola, Inc. (USA) ) Le, N. ( Motorola, Inc. (USA) ) Gehoski, K.A. ( Motorola, Inc. (USA) ) Young, S. ( Motorola, Inc. (USA) ) Dauksher, W.J. ( Motorola, Inc. (USA) ) Nordquist, K.J. ( Motorola, Inc. (USA) ) Resnick, D.J. ( Motorola, Inc. (USA) ) - 掲載資料名:
- Emerging Lithographic Technologies VIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5374
- 発行年:
- 2004
- 開始ページ:
- 371
- 終了ページ:
- 382
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452870 [0819452874]
- 言語:
- 英語
- 請求記号:
- P63600/5374.1
- 資料種別:
- 国際会議録
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