Simulation and fabrication of silicon-oxynitride rib structure arrayed waveguide grating device

Simulation and fabrication of silicon-oxynitride rib structure arrayed waveguide grating device

著者名:

Liu, W.-J. ( I-Shou Univ. (Taiwan) )
Lai, Y.-C. ( National Chiao Tung Univ. (Taiwan) )
Weng, M.-H. ( National Nano Device Lab. (Taiwan) )
Cheng, C.-M. ( National Chiao Tung Univ. (Taiwan) )
Lee, P.-H. ( I-Shou Univ. (Taiwan) )

掲載資料名:

Emerging optoelectronic applications : 26-27 January, 2004, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5363

発行年:

2004

開始ページ:

164

終了ページ:

175

総ページ数:

12

出版情報:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452719 [0819452718]

言語:

英語

請求記号:

P63600/5363

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013707
シリーズID:	PA00000029
会議名:	Photonics West - Optoelectronic Materials and Devices : Emerging optoelectronic applications
回次:	2004
会議開催地:	San Jose, CA, USA
会議開催年:	2004.01.26-2004.01.27

類似資料:

1 国際会議録 Simulation and fabrication of amorphous silicon rib-type arrayed waveguide grating Liu, W.-J., Cheng, Y.-H., Chen, S., Lai, I-T., Lai, Y.-C., Weng, M.-H., Shih, Y.-H., Lee, C.-D. SPIE - The International Society of Optical Engineering	7 国際会議録 Isotope Exchange In Hydrogenated Silicon-Oxynitride (SiON) For 1.55 μm Optical Waveguide Applications Cheng, K., Lee, J., Lyding, J. W., Salemink, H. W. M. Materials Research Society
2 国際会議録 Simulation and fabrication of silicon oxynitride array waveguide grating for optical communication Liu, W.-J., Lai, Y.-C., Weng, M.-H., Chen, C.-M., Lee, P.-H. SPIE - The International Society of Optical Engineering	8 国際会議録 Fabrication and measurement of polymer/Si arrayed waveguide grating multiplexer Wang, F., Zhao, Y., Zhang, D.M., Cui, Z.C., Yi, M.B., Liu, S.Y., Sun, W. SPIE-The International Society for Optical Engineering
3 国際会議録 Rib-type polyimides and polyimide-silica hybrid arrayed waveguide grating simulation and fabrication Liu, W.-J., Lai, Y.-T., Lai, Y.-C., Weng, M.-H., Chen, C.-M. SPIE - The International Society of Optical Engineering	9 国際会議録 Performance analysis of a polymer/silicon arrayed waveguide grating Zhang, D.M., Zhao, Y., Ma, C.S., Wang, F., Cui, Z.C., Yi, M.B., Liu, S.Y., Xu, W. SPIE-The International Society for Optical Engineering
4 国際会議録 Characterization of integrated Bragg gratings on silicon-on-insulator rib waveguides Chan, S.P., Passaro, V.M.N., Lim, S.T., Png, C.E., Headley, W., Masanovic, G., Reed, Graham T., Atta, R.M.H., Ensell, … SPIE - The International Society of Optical Engineering	10 国際会議録 Surface cleaning effects on reliability for devices with ultrathin oxides or oxynitrides K. Lai, M.-Y. Hao, W.-M. Chen, J.C. Lee Society of Photo-optical Instrumentation Engineers
5 国際会議録 Optimization and fabrication of a polymeric-arrayed waveguide grating multiplexer Guo, W.-B., Ma, C.-S., Chen, W.-Y., Liu, C.-X., Dong, W., Zhang, D.-M., Cui, Z.-C., Liu, S.-Y. SPIE-The International Society for Optical Engineering	11 国際会議録 Fabrication of long-period waveguide gratings Shum,P., Chan,H.P., Wong,E.M.W., Gambling,W.A., Li,S.P., Chow,C.K., Chen,Z. SPIE-The International Society for Optical Engineering
6 国際会議録 An XPS study of silicon oxynitride rapid thermally grown in nitric oxide Lai, W. H., Li, M. F., Pan, J. S., Liu, R., Chan, L., Chua, T. C. MRS-Materials Research Society	12 国際会議録 Advances in polymer optical devices and waveguide fabrication techniques (Invited Paper) Herman, W.N., Chen, W.-Y., Kim, Y., Hutchinson, G., Cao, W.L., Leng, Y., Yun, V., Liang, H., Peng, Y.-H., Du, M., Lucas, … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12