Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology
- 著者名:
- Venkataraman, S. ( Univ. of Delaware (USA) )
- Murakowski, J. ( Univ. of Delaware (USA) )
- Schneider, G.J. ( Univ. of Delaware (USA) )
- Prather, D.W. ( Univ. of Delaware (USA) )
- 掲載資料名:
- Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5347
- 発行年:
- 2004
- 開始ページ:
- 195
- 終了ページ:
- 204
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452559 [0819452556]
- 言語:
- 英語
- 請求記号:
- P63600/5347
- 資料種別:
- 国際会議録
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