Piezoelectric microflextensional actuator
- 著者名:
- Cheong, J. ( The Pennsylvania State Univ. (USA) )
- Tadigadapa, S.A. ( The Pennsylvania State Univ. (USA) )
- Rahn, C.D. ( The Pennsylvania State Univ. (USA) )
- 掲載資料名:
- MEMS/MOEMS Components and Their Applications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5344
- 発行年:
- 2004
- 開始ページ:
- 106
- 終了ページ:
- 114
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452528 [0819452521]
- 言語:
- 英語
- 請求記号:
- P63600/5344
- 資料種別:
- 国際会議録
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