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Fabrication and characterization of ohmic contacting RF MEMS switches

著者名:
Dyck, C.W. ( Sandia National Labs. (USA) )
Plut, T.A. ( Sandia National Labs. (USA) )
Nordquist, C.D. ( Sandia National Labs. (USA) )
Finnegan, P.S. ( Sandia National Labs. (USA) and L&M Technologies (USA) )
Austin, F. ( Sandia National Labs. (USA) and The Plus Group (USA) )
Reines, I.C. ( Sandia National Labs. (USA) )
Goldsmith, C. ( Sandia National Labs. (USA) and MEMTronics Corp. (USA) )
さらに 2 件
掲載資料名:
MEMS/MOEMS Components and Their Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5344
発行年:
2004
開始ページ:
79
終了ページ:
88
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452528 [0819452521]
言語:
英語
請求記号:
P63600/5344
資料種別:
国際会議録

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