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Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles

著者名:
Song, Y.L. ( Institute for Applied Science and Engineering Research (Taiwan) )
Tsai, S.C. ( Institute for Applied Science and Engineering Research (Taiwan) and California State Univ./Long Beach (USA) )
Chen, W.J. ( Institute for Applied Science and Engineering Research (Taiwan) )
Chou, Y.F. ( National Taiwan Univ. (Taiwan) )
Tseng, T.K. ( Institute for Applied Science and Engineering Research (Taiwan) )
Tsai, C.S. ( Institute of Applied Science and Engineering Research (Taiwan) and Univ. of California/Irvine (USA) )
さらに 1 件
掲載資料名:
MEMS/MOEMS Components and Their Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5344
発行年:
2004
開始ページ:
44
終了ページ:
50
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452528 [0819452521]
言語:
英語
請求記号:
P63600/5344
資料種別:
国際会議録

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