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Planar distortion quantification to evaluate PDMS stamps affixed on glass support

著者名:
He, Q. ( Zhuzhou Institute of Technology (China) and Southeast Univ. (China) )
Liu, Z. ( Zhuzhou Institute of Technology (China) and Southeast Univ. (China) )
Tang, J. ( Zhuzhou Institute of Technology (China) )
Nie, L. ( Zhuzhou Institute of Technology (China) )
Xiang, H. ( Zhuzhou Institute of Technology (China) )
Chen, H. ( Zhuzhou Institute of Technology (China) )
Xiao, P. ( Southeast Univ. (China) )
He, N. ( Zhuzhou Institute of Technology (China) )
さらに 3 件
掲載資料名:
Reliability, Testing, and Characterization of MEMS/MOEMS III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5343
発行年:
2004
開始ページ:
302
終了ページ:
309
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452511 [0819452513]
言語:
英語
請求記号:
P63600/5343
資料種別:
国際会議録

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