Investigation of adhesion during operation of MEMS cantilevers
- 著者名:
- Ali, S.M. ( Univ. of Illinois/Urbana-Champaign (USA) )
- Phinney, L.M. ( Univ. of Illinois/Urbana-Champaign (USA) )
- 掲載資料名:
- Reliability, Testing, and Characterization of MEMS/MOEMS III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5343
- 発行年:
- 2004
- 開始ページ:
- 215
- 終了ページ:
- 226
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452511 [0819452513]
- 言語:
- 英語
- 請求記号:
- P63600/5343
- 資料種別:
- 国際会議録
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8
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