Defects and friction in alkylsilane self-assembled monolayers
- 著者名:
- Chandross, M. ( Sandia National Labs. (USA) )
- Grest, G.S. ( Sandia National Labs. (USA) )
- Stevens, M.J. ( Sandia National Labs. (USA) )
- Webb III, E.B. ( Sandia National Labs. (USA) )
- 掲載資料名:
- Reliability, Testing, and Characterization of MEMS/MOEMS III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5343
- 発行年:
- 2004
- 開始ページ:
- 207
- 終了ページ:
- 214
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452511 [0819452513]
- 言語:
- 英語
- 請求記号:
- P63600/5343
- 資料種別:
- 国際会議録
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