Novel process for realization of multiple-axis actuators suitable for the realization of an optical switch

Novel process for realization of multiple-axis actuators suitable for the realization of an optical switch

著者名:

Del Sarto, M. ( STMicroelectronics (Italy) )
Sassolini, S. ( STMicroelectronics (Italy) )
Marchi, M. ( STMicroelectronics (Italy) )
Baldo, L. ( STMicroelectronics (Italy) )

掲載資料名:

Micromachining and Microfabrication Process Technology IX

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5342

発行年:

2004

開始ページ:

65

終了ページ:

73

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452504 [0819452505]

言語:

英語

請求記号:

P63600/5342

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013686
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining and Microfabrication Process Technology
回次:	2004 : 9th
会議開催地:	San Jose, CA, USA
会議開催年:	2004.01.27-2004.01.29

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