Surface microfabrication of fused silica glass by UV laser irradiation
- 著者名:
Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Sato, T. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Narazaki, A. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Ding, X. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Kurosaki, R. ( National Institute of Advanced Industrial Science and Technology (Japan) ) - 掲載資料名:
- Photon Processing in Microelectronics and Photonics III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5339
- 発行年:
- 2004
- 開始ページ:
- 112
- 終了ページ:
- 117
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452474 [0819452475]
- 言語:
- 英語
- 請求記号:
- P63600/5339
- 資料種別:
- 国際会議録
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