Laser patterning of thin films of TiNiPd deposited on silicon substrate

Laser patterning of thin films of TiNiPd deposited on silicon substrate

著者名:

Mathe, V.K. ( RMIT Univ. (Australia) and CRC for Microtechnology (Australia) )
Sood, D.K. ( RMIT Univ. (Australia) and CRC for Microtechnology (Australia) )
Hayes, J.P. ( Swinburne Univ. of Technology (Australia) and CRC for Microtechnology (Australia) )

掲載資料名:

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5276

発行年:

2004

開始ページ:

36

終了ページ:

46

総ページ数:

11

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451699 [081945169X]

言語:

英語

請求記号:

P63600/5276

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013618
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS, microelectronics, and photonics
回次:	2003 : 3rd
会議開催地:	Perth, Australia
会議開催年:	2003.12.10-2003.12.12

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