Optical properties and their depth profiling of Si nanocrystals embedded in SiO2 matrix

Optical properties and their depth profiling of Si nanocrystals embedded in SiO2 matrix

著者名:

Chen, T.P. ( Nanyang Technological Univ. (Singapore) )
Liu, Y. ( Nanyang Technological Univ. (Singapore) )
Tse, M.S. ( Nanyang Technological Univ. (Singapore) )
Gui, D. ( Institute of Microelectronics (Singapore) )

掲載資料名:

BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5275

発行年:

2004

開始ページ:

378

終了ページ:

382

総ページ数:

5

出版情報:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451682 [0819451681]

言語:

英語

請求記号:

P63600/5275

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013617
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : BioMEMS and nanotechnology
回次:	2003
会議開催地:	Perth, Australia
会議開催年:	2003.12.10-2003.12.12

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