Study of dry etching pattern profile of chromeless phase lithography (CPL) mask
- 著者名:
Lin, J. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) ) Hsu, M. ( ASML MaskTools, Inc. (USA) ) Hsu, T. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) ) Hsu, S.D. ( ASML MaskTools, Inc. (USA) ) Shi, X. ( ASML MaskTools, Inc. (USA) ) Van Den Broeke, D.J. ( ASML MaskTools, Inc. (USA) ) Chen, J.F. ( ASML MaskTools, Inc. (USA) ) Tang, F.C. ( Winbond Electronics Corp. (Taiwan) ) Hsieh, W.A. ( Winbond Electronics Corp. (Taiwan) ) Huang, C.Y. ( Winbond Electronics Corp. (Taiwan) ) - 掲載資料名:
- 23rd Annual BACUS Symposium on Photomask Technology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5256
- 発行年:
- 2003
- 開始ページ:
- 806
- 終了ページ:
- 813
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451439 [0819451436]
- 言語:
- 英語
- 請求記号:
- P63600/5256.2
- 資料種別:
- 国際会議録
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