Characterization of CaF2 substrates for VUV fluoride coatings

Characterization of CaF2 substrates for VUV fluoride coatings

著者名:

Hultaker, A. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
Gliech, S. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
Gessner, H. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
Duparre, A. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )

掲載資料名:

Advances in optical thin films : 30 September-3 October 2003, St. Etienne, France

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5250

発行年:

2004

開始ページ:

119

終了ページ:

126

総ページ数:

8

出版情報:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451347 [0819451347]

言語:

英語

請求記号:

P63600/5250

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013595
シリーズID:	PA00000029
会議名:	SPIE Optical Systems Design : Advances in optical thin films
回次:	2003
会議開催地:	St. Etienne, France
会議開催年:	2003.09.30-2003.10.03

類似資料:

1 国際会議録 Characterizing CaF2 for VUV optical components: roughness, surface scatter, and bulk scatter Hultaker, A., Benkert, N., Gliech, S., Duparre, A. SPIE-The International Society for Optical Engineering	7 国際会議録 Investigating the ArF laser stability of CaF2 at elevated fluences [5878-14] Burkert, A.., Muhlig, C., Triebel, W., Keutel, D., Natura, U., Parthier, L., Gliech, S., Schroder, S., Duparre, A. SPIE - The International Society of Optical Engineering
2 国際会議録 157- and 193-nm scatter, R, and T measurement technique Gliech, S., Gessner, H., Hultaker, A., Duparre, A. SPIE - The International Society of Optical Engineering	8 国際会議録 Advanced methods for surface and subsurface defect characterization of optical components Steinert,J., Gliech,S., Wuttig,A., Duparre,A., Truckenbrodt,H. SPIE-The International Society for Optical Engineering
3 国際会議録 VUV light scattering measurements of substrtes and thin film coatings Hultaker, A., Gliech, S., Benkert, N., Duparre, A. SPIE - The International Society of Optical Engineering	9 国際会議録 Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components [5963-27] Schroder, S., Uhlig, H., Duparre, A., Kaiser, N. SPIE - The International Society of Optical Engineering
4 国際会議録 System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm Gliech, S., Gessner, H., Duparre, A. SPIE-The International Society for Optical Engineering	10 国際会議録 Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement Duparre,A., Gliech,S. SPIE-The International Society for Optical Engineering
5 国際会議録 Sensitive and flexible light scatter techniques from the VUV to IR regions [5965-48] Schroder, S., Gliech, S., Duparre, A. SPIE - The International Society of Optical Engineering	11 国際会議録 Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement Duparre,A., Gliech,S. SPIE-The International Society for Optical Engineering
6 国際会議録 DUV/VUV light scattering measurement of optical components for lithography applications Gliech,S., Steinert,J., Flemming,M., Duparre,A. SPIE-The International Society for Optical Engineering	12 国際会議録 Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths Gliech,S., Duparre,A. SPIE-The International Society for Optical Engineering

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