User-defined objects for stray-light and illumination system modeling
- 著者名:
- Moore, K.E. ( ZEMAX Development Corp. (USA) )
- Nicholson, M.G. ( Optima Research Ltd. (United Kingdom) )
- Warwick, J.R. ( Optima Research Ltd. (United Kingdom) )
- 掲載資料名:
- Optical design and engineering : 30 September-3 October 2003, St. Etienne, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5249
- 発行年:
- 2004
- 開始ページ:
- 400
- 終了ページ:
- 407
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451330 [0819451339]
- 言語:
- 英語
- 請求記号:
- P63600/5249
- 資料種別:
- 国際会議録
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5
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Investigation of stray light characteristic by multiple Gaussian modeling and its OPC application
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