Near-field detection of the quality of high-density gratings with nanotechnology

Near-field detection of the quality of high-density gratings with nanotechnology

著者名:

Xi, P. ( Shanghai Institute of Optics and Fine Mechanics (China) )
Zhou, C. ( Shanghai Institute of Optics and Fine Mechanics (China) )
Luo, H. ( Shanghai Institute of Optics and Fine Mechanics (China) )
Dai, E. ( Shanghai Institute of Optics and Fine Mechanics (China) )
Liu, L. ( Shanghai Institute of Optics and Fine Mechanics (China) )

掲載資料名:

Nano- and micro-optics for information systems : 3-4 August 2003, San Diego, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5225

発行年:

2003

開始ページ:

140

終了ページ:

144

総ページ数:

5

出版情報:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819450982 [0819450987]

言語:

英語

請求記号:

P63600/5225

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013579
シリーズID:	PA00000029
会議名:	Optics & Photonics : Nano- and Micro-Optics for Information Systems
回次:	2003
会議開催地:	San Diego, CA, USA
会議開催年:	2003.08.03-2003.08.04

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