On the accuracy of optical thin film parameter determination based on spectrophotometric data
- 著者名:
- Tikhonravov, A.V. ( Moscow State Univ. (Russia) )
- Trubetskov, M.K. ( Moscow State Univ. (Russia) )
- DeBell, G.W. ( MLD Technologies (USA) )
- 掲載資料名:
- Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5188
- 発行年:
- 2003
- 開始ページ:
- 190
- 終了ページ:
- 199
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450616 [0819450618]
- 言語:
- 英語
- 請求記号:
- P63600/5188
- 資料種別:
- 国際会議録
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