Image detection system for 157-nm using fluorescent glass
- 著者名:
- Otani, Y. ( Tokyo Univ. of Agriculture and Technology (Japan) )
- Takahashi, M. ( Tokyo Univ. of Agriculture and Technology (Japan) )
- Jin, L. ( Tokyo Univ. of Agriculture and Technology (Japan) )
- Kowa, H. ( Uniopt Co., Ltd. (Japan) )
- Umeda, N. ( Tokyo Univ. of Agriculture and Technology (USA) )
- 掲載資料名:
- Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5188
- 発行年:
- 2003
- 開始ページ:
- 134
- 終了ページ:
- 137
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450616 [0819450618]
- 言語:
- 英語
- 請求記号:
- P63600/5188
- 資料種別:
- 国際会議録
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8
国際会議録
Simultaneous measurement of linear and circular birefringence with heterodyne interferometry
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
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SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |