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VUV light scattering measurements of substrtes and thin film coatings

著者名:
  • Hultaker, A. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
  • Gliech, S. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
  • Benkert, N. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
  • Duparre, A. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
掲載資料名:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5188
発行年:
2003
開始ページ:
115
終了ページ:
122
総ページ数:
8
出版情報:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450616 [0819450618]
言語:
英語
請求記号:
P63600/5188
資料種別:
国際会議録

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