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On-machine measurement with LTP (long trace profiler)

著者名:
Moriyasu, S. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Takacs, P.Z. ( Brookhaven National Lab. (USA) )
Kato, J. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Lin, W. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Yamagata, Y. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Ohmori, H. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
さらに 1 件
掲載資料名:
Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5180
発行年:
2003
開始ページ:
385
終了ページ:
392
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450531 [0819450537]
言語:
英語
請求記号:
P63600/5180
資料種別:
国際会議録

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