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CO2 laser annealing with NiTi thin films deposited by sputtering

著者名:
He, Q. ( Data Storage Institute (Singapore) and Nanyang Technical Univ. (Singapore) )
Huang, W. ( Nanyang Technological Univ. (Singapore) )
Hong, M. ( Data Storage Institute (Singapore) )
Chong, T.C. ( Data Storage Institute (Singapore) )
Fu, Y. ( Nanyang Technological Univ. (Singapore) )
Du, H. ( Nanyang Technological Univ. (Singapore) )
さらに 1 件
掲載資料名:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5063
発行年:
2003
開始ページ:
319
終了ページ:
322
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448699 [0819448699]
言語:
英語
請求記号:
P63600/5063
資料種別:
国際会議録

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