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Capacitive pressure sensor for MEMS

著者名:
  • Gupta, A. ( Solid State Physics Lab. (India) )
  • Ahmad, A. ( Solid State Physics Lab. (India) )
  • Singh, R. ( Solid State Physics Lab. (India) )
掲載資料名:
Smart Materials, Structures, and Systems
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5062
発行年:
2003
開始ページ:
450
終了ページ:
454
総ページ数:
5
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448682 [0819448680]
言語:
英語
請求記号:
P63600/5062.1
資料種別:
国際会議録

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