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New technique for Si-based microphotonic components fabrication

著者名:
  • Cristea, D. ( National Institute for Research and Development in Microtechnologies (Romania) )
  • Manea, E. ( National Institute for Research and Development in Microtechnologies (Romania) )
掲載資料名:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4829
発行年:
2003
開始ページ:
660
終了ページ:
662
総ページ数:
3
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819445964 [0819445967]
言語:
英語
請求記号:
P63600/4829.2
資料種別:
国際会議録

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