Deposition of SiO2 and SiO2:Ge Films for Optical Applications in a Matrix Distributed Electron Cyclotron Resonance Reactor
- 著者名:
- 掲載資料名:
- Advanced materials forum II : proceedings of the II International Materials Symposium, Materiais 2003 and XI Encontro Sociedade Portugesa de Materiais - SPM, Campus da Caparica, April 14-16, Caparica, Portugal, 2003
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 455-456
- 発行年:
- 2004
- 開始ページ:
- 25
- 終了ページ:
- 29
- 総ページ数:
- 5
- 出版情報:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499410 [0878499415]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Trans Tech Publications |
6
国際会議録
ELECTRON CYCLOTRON RESONANCE HYDROGENATION OF POLl-Si THIN FILM TRANSISTORS ON SiO2/Si SUBSTRATES
Materials Research Society |
MRS - Materials Research Society |