High-Resolution XRD Investigations of the Strain Reduction in 3C-SiC Thin Films Grown on Si (111) Substrates
- 著者名:
Weih, P. Cimalla, V. Forster, C. Pezoldt, J. Stauden, Th. Spiess, L. Romanus, H. Hermann, M. Eickhoff, M. Masri, P. Ambacher, O. - 掲載資料名:
- Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 433-436
- 発行年:
- 2003
- 開始ページ:
- 233
- 終了ページ:
- 236
- 総ページ数:
- 4
- 出版情報:
- Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499205 [0878499202]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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