Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition
- 著者名:
- 掲載資料名:
- Functionally graded materials VII : proceedings of the seventh International Symposium on Functionally Graded Materials (FGM 2002), Beijing, China, October 15-18, 2002
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 423-425
- 発行年:
- 2003
- 開始ページ:
- 585
- 終了ページ:
- 590
- 総ページ数:
- 6
- 出版情報:
- Uetikon-Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499151 [0878499156]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
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3
国際会議録
Properties of Tetrahedral Amorphous Carbon Films Deposited by the Filtered Cathodic Arc Method
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MRS - Materials Research Society |
Society of Vacuum Coaters |
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